![](https://dblp.uni-trier.de/img/logo.ua.320x120.png)
![](https://dblp.uni-trier.de/img/dropdown.dark.16x16.png)
![](https://dblp.uni-trier.de/img/peace.dark.16x16.png)
Остановите войну!
for scientists:
![search dblp search dblp](https://dblp.uni-trier.de/img/search.dark.16x16.png)
![search dblp](https://dblp.uni-trier.de/img/search.dark.16x16.png)
default search action
BibTeX record conf/cicai/JiangLZW21
@inproceedings{DBLP:conf/cicai/JiangLZW21, author = {Wenlan Jiang and Chunpu Lv and Tao Zhang and Huan{-}gang Wang}, editor = {Lu Fang and Yiran Chen and Guangtao Zhai and Z. Jane Wang and Ruiping Wang and Weisheng Dong}, title = {Phase Partition Based Virtual Metrology for Material Removal Rate Prediction in Chemical Mechanical Planarization Process}, booktitle = {Artificial Intelligence - First {CAAI} International Conference, {CICAI} 2021, Hangzhou, China, June 5-6, 2021, Proceedings, Part {I}}, series = {Lecture Notes in Computer Science}, volume = {13069}, pages = {180--190}, publisher = {Springer}, year = {2021}, url = {https://doi.org/10.1007/978-3-030-93046-2\_16}, doi = {10.1007/978-3-030-93046-2\_16}, timestamp = {Mon, 12 Feb 2024 16:07:12 +0100}, biburl = {https://dblp.org/rec/conf/cicai/JiangLZW21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
![](https://dblp.uni-trier.de/img/cog.dark.24x24.png)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.