BibTeX record conf/cecnet/WanM23

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@inproceedings{DBLP:conf/cecnet/WanM23,
  author       = {Jian Wan and
                  Se{\'{a}}n F. McLoone},
  editor       = {Antonio J. Tall{\'{o}}n{-}Ballesteros and
                  Estefan{\'{\i}}a Cort{\'{e}}s{-}Ancos and
                  Diego A. L{\'{o}}pez Garc{\'{\i}}a},
  title        = {Remaining Useful Life Estimation of Lenses for an Ion Beam Etching
                  Tool in Semiconductor Manufacturing Using Deep Convolutional Neural
                  Networks},
  booktitle    = {Electronics, Communications and Networks - Proceedings of the 13th
                  International Conference (CECNet 2023), Macao, China, 17-20 November
                  2023},
  series       = {Frontiers in Artificial Intelligence and Applications},
  volume       = {381},
  pages        = {68--74},
  publisher    = {{IOS} Press},
  year         = {2023},
  url          = {https://doi.org/10.3233/FAIA231177},
  doi          = {10.3233/FAIA231177},
  timestamp    = {Mon, 05 Feb 2024 20:30:53 +0100},
  biburl       = {https://dblp.org/rec/conf/cecnet/WanM23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}