BibTeX record conf/cdc/HarirchiVSPS13

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@inproceedings{DBLP:conf/cdc/HarirchiVSPS13,
  author       = {Farshad Harirchi and
                  Tyrone Vincent and
                  Anand Subramanian and
                  Kameshwar Poolla and
                  Broc Stirton},
  title        = {Characterizing and resolving unobservability in run-to-run control
                  of high mix semiconductor manufacturing},
  booktitle    = {Proceedings of the 52nd {IEEE} Conference on Decision and Control,
                  {CDC} 2013, Florence, Italy, December 10-13, 2013},
  pages        = {7022--7027},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/CDC.2013.6761002},
  doi          = {10.1109/CDC.2013.6761002},
  timestamp    = {Fri, 04 Mar 2022 13:29:02 +0100},
  biburl       = {https://dblp.org/rec/conf/cdc/HarirchiVSPS13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}