Modeling and identification of the dynamics of electrostatically actuated microcantilever with integrated thermal sensor.

Pranav Agarwal Deepak R. Sahoo Abu Sebastian Haralampos Pozidis Murti V. Salapaka Modeling and identification of the dynamics of electrostatically actuated microcantilever with integrated thermal sensor. 2624-2630 2008 CDC http://dx.doi.org/10.1109/CDC.2008.4739363 conf/cdc/2008 db/conf/cdc/cdc2008.html#AgarwalSSPS08