BibTeX record conf/ccta/WitvoetKKB17

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@inproceedings{DBLP:conf/ccta/WitvoetKKB17,
  author       = {Gert Witvoet and
                  Stefan Kuiper and
                  Geerten Kramer and
                  Max Baeten},
  title        = {Predictive-model-based {MIMO} motion control of an unstable 6-DoF
                  hexapod stage for overlay measurements},
  booktitle    = {{IEEE} Conference on Control Technology and Applications, {CCTA} 2017,
                  Mauna Lani Resort, HI, USA, August 27-30, 2017},
  pages        = {726--731},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/CCTA.2017.8062548},
  doi          = {10.1109/CCTA.2017.8062548},
  timestamp    = {Tue, 23 Mar 2021 14:21:29 +0100},
  biburl       = {https://dblp.org/rec/conf/ccta/WitvoetKKB17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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