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BibTeX record conf/case/PurwinsNBHKLPW11
@inproceedings{DBLP:conf/case/PurwinsNBHKLPW11, author = {Hendrik Purwins and Ahmed Nagi and Bernd Barak and Uwe Hockele and Andreas Kyek and Benjamin Lenz and Gunter Pfeifer and Kurt Weinzierl}, title = {Regression methods for prediction of {PECVD} Silicon Nitride layer thickness}, booktitle = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2011, Trieste, Italy, Aug. 24-27, 2011}, pages = {387--392}, publisher = {{IEEE}}, year = {2011}, url = {https://doi.org/10.1109/CASE.2011.6042426}, doi = {10.1109/CASE.2011.6042426}, timestamp = {Wed, 16 Oct 2019 14:14:53 +0200}, biburl = {https://dblp.org/rec/conf/case/PurwinsNBHKLPW11.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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