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BibTeX record conf/case/LeeL11
@inproceedings{DBLP:conf/case/LeeL11, author = {Jun{-}Ho Lee and Tae{-}Eog Lee}, title = {Concurrent processing of multiple wafer types in a single-armed cluster tool}, booktitle = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2011, Trieste, Italy, Aug. 24-27, 2011}, pages = {102--107}, publisher = {{IEEE}}, year = {2011}, url = {https://doi.org/10.1109/CASE.2011.6042519}, doi = {10.1109/CASE.2011.6042519}, timestamp = {Wed, 16 Oct 2019 14:14:53 +0200}, biburl = {https://dblp.org/rec/conf/case/LeeL11.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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