BibTeX record conf/case/KwonM07

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@inproceedings{DBLP:conf/case/KwonM07,
  author       = {Ky Sang Kwon and
                  Leon F. McGinnis},
  title        = {SysML-based Simulation Framework for Semiconductor Manufacturing},
  booktitle    = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2007,
                  September 22-25, 2007. Scottsdale, Arizona, {USA}},
  pages        = {1075--1080},
  publisher    = {{IEEE}},
  year         = {2007},
  url          = {https://doi.org/10.1109/COASE.2007.4341777},
  doi          = {10.1109/COASE.2007.4341777},
  timestamp    = {Wed, 16 Oct 2019 14:14:53 +0200},
  biburl       = {https://dblp.org/rec/conf/case/KwonM07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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