BibTeX record conf/bcicts/PetersBCHL23

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@inproceedings{DBLP:conf/bcicts/PetersBCHL23,
  author       = {Mike Peters and
                  David A. Britz and
                  Miao{-}Chun Chen and
                  Manish Hemkar and
                  Andy Lo},
  title        = {High Volume Wafer Fab Equipment for {RF} Technologies},
  booktitle    = {{IEEE} BiCMOS and Compound Semiconductor Integrated Circuits and Technology
                  Symposium, {BCICTS} 2023, Monterey, CA, USA, October 16-18, 2023},
  pages        = {257--262},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/BCICTS54660.2023.10310969},
  doi          = {10.1109/BCICTS54660.2023.10310969},
  timestamp    = {Fri, 01 Dec 2023 14:30:09 +0100},
  biburl       = {https://dblp.org/rec/conf/bcicts/PetersBCHL23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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