BibTeX record conf/asicon/WangWZ19

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@inproceedings{DBLP:conf/asicon/WangWZ19,
  author       = {Xubo Wang and
                  Qing Wang and
                  Jia Zhou},
  title        = {Inverse {RIE} micro-loading in deep etching of silicon via array},
  booktitle    = {13th {IEEE} International Conference on ASIC, {ASICON} 2019, Chongqing,
                  China, October 29 - November 1, 2019},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/ASICON47005.2019.8983664},
  doi          = {10.1109/ASICON47005.2019.8983664},
  timestamp    = {Wed, 12 Feb 2020 16:13:42 +0100},
  biburl       = {https://dblp.org/rec/conf/asicon/WangWZ19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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