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BibTeX record conf/asicon/LiuLHZQY21
@inproceedings{DBLP:conf/asicon/LiuLHZQY21, author = {Wei Liu and Gang Liu and Bing He and Jie Zhang and Hanlin Qin and Shuai Yuan}, editor = {Fan Ye and Ting{-}Ao Tang}, title = {Development of {MEMS} Capacitive Mirror Structure with {CMOS} Compatible Process}, booktitle = {14th {IEEE} International Conference on ASIC, {ASICON} 2021, Kunming, China, October 26-29, 2021}, pages = {1--3}, publisher = {{IEEE}}, year = {2021}, url = {https://doi.org/10.1109/ASICON52560.2021.9620200}, doi = {10.1109/ASICON52560.2021.9620200}, timestamp = {Thu, 22 Dec 2022 14:31:51 +0100}, biburl = {https://dblp.org/rec/conf/asicon/LiuLHZQY21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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