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BibTeX record conf/amcc/Tyan05a
@inproceedings{DBLP:conf/amcc/Tyan05a, author = {Feng Tyan}, title = {Pad conditioning density distribution in {CMP} process with diamond dresser}, booktitle = {American Control Conference, {ACC} 2005, Portland, OR, USA, 8-10 June, 2005}, pages = {2052--2057}, publisher = {{IEEE}}, year = {2005}, url = {https://doi.org/10.1109/ACC.2005.1470272}, doi = {10.1109/ACC.2005.1470272}, timestamp = {Fri, 07 Oct 2022 18:48:01 +0200}, biburl = {https://dblp.org/rec/conf/amcc/Tyan05a.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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