BibTeX record conf/amcc/Tyan05a

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@inproceedings{DBLP:conf/amcc/Tyan05a,
  author       = {Feng Tyan},
  title        = {Pad conditioning density distribution in {CMP} process with diamond
                  dresser},
  booktitle    = {American Control Conference, {ACC} 2005, Portland, OR, USA, 8-10 June,
                  2005},
  pages        = {2052--2057},
  publisher    = {{IEEE}},
  year         = {2005},
  url          = {https://doi.org/10.1109/ACC.2005.1470272},
  doi          = {10.1109/ACC.2005.1470272},
  timestamp    = {Fri, 07 Oct 2022 18:48:01 +0200},
  biburl       = {https://dblp.org/rec/conf/amcc/Tyan05a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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