BibTeX record conf/amcc/Tyan05

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@inproceedings{DBLP:conf/amcc/Tyan05,
  author       = {Feng Tyan},
  title        = {Non-uniformity of wafer and pad in {CMP:} kinematic aspects of view},
  booktitle    = {American Control Conference, {ACC} 2005, Portland, OR, USA, 8-10 June,
                  2005},
  pages        = {2046--2051},
  publisher    = {{IEEE}},
  year         = {2005},
  url          = {https://doi.org/10.1109/ACC.2005.1470271},
  doi          = {10.1109/ACC.2005.1470271},
  timestamp    = {Fri, 07 Oct 2022 18:48:01 +0200},
  biburl       = {https://dblp.org/rec/conf/amcc/Tyan05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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