BibTeX record conf/amcc/FidanRPM01

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@inproceedings{DBLP:conf/amcc/FidanRPM01,
  author       = {Baris Fidan and
                  I. G. Rosen and
                  Tyler Parent and
                  Anupam Madhukar},
  title        = {Multi-variable adaptive control of CF\({}_{\mbox{4}}\)/O\({}_{\mbox{2}}\)
                  plasma etching of silicon nitride thin films},
  booktitle    = {American Control Conference, {ACC} 2001, Arlington, VA, USA, 25-27
                  June, 2001},
  pages        = {1280--1285},
  publisher    = {{IEEE}},
  year         = {2001},
  url          = {https://doi.org/10.1109/ACC.2001.945899},
  doi          = {10.1109/ACC.2001.945899},
  timestamp    = {Wed, 05 Jan 2022 10:14:49 +0100},
  biburl       = {https://dblp.org/rec/conf/amcc/FidanRPM01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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