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BibTeX record conf/amcc/Emami-NaeiniEKR04
@inproceedings{DBLP:conf/amcc/Emami-NaeiniEKR04, author = {Abbas Emami{-}Naeini and Jon L. Ebert and Robert L. Kosut and Dick de Roover and Sarbajit Ghosal}, title = {Model-based control for semiconductor and advanced materials processing: an overview}, booktitle = {Proceedings of the 2004 American Control Conference, {ACC} 2004, Boston, MA, USA, June 30 - July 2, 2004}, pages = {3902--3909}, publisher = {{IEEE}}, year = {2004}, url = {https://doi.org/10.23919/ACC.2004.1383920}, doi = {10.23919/ACC.2004.1383920}, timestamp = {Thu, 24 Nov 2022 09:21:29 +0100}, biburl = {https://dblp.org/rec/conf/amcc/Emami-NaeiniEKR04.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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