BibTeX record conf/amcc/EbertRPLGKE04

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@inproceedings{DBLP:conf/amcc/EbertRPLGKE04,
  author       = {Jon L. Ebert and
                  Dick de Roover and
                  La Moyne L. Porter and
                  V. A. Lisiewicz and
                  Sarbajit Ghosal and
                  Robert L. Kosut and
                  Abbas Emami{-}Naeini},
  title        = {Model-based control of rapid thermal processing for semiconductor
                  wafers},
  booktitle    = {Proceedings of the 2004 American Control Conference, {ACC} 2004, Boston,
                  MA, USA, June 30 - July 2, 2004},
  pages        = {3910--3921},
  publisher    = {{IEEE}},
  year         = {2004},
  url          = {https://doi.org/10.23919/ACC.2004.1383921},
  doi          = {10.23919/ACC.2004.1383921},
  timestamp    = {Thu, 24 Nov 2022 09:21:35 +0100},
  biburl       = {https://dblp.org/rec/conf/amcc/EbertRPLGKE04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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