BibTeX record conf/aimech/RawlingsDHCK14

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@inproceedings{DBLP:conf/aimech/RawlingsDHCK14,
  author       = {Colin Rawlings and
                  Urs D{\"{u}}rig and
                  James L. Hedrick and
                  Dan Coady and
                  Armin Knoll},
  title        = {Nanometer control of the markerless overlay process using thermal
                  scanning probe lithography},
  booktitle    = {{IEEE/ASME} International Conference on Advanced Intelligent Mechatronics,
                  {AIM} 2014, Besancon, France, July 8-11, 2014},
  pages        = {1670--1675},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/AIM.2014.6878324},
  doi          = {10.1109/AIM.2014.6878324},
  timestamp    = {Wed, 16 Oct 2019 14:14:54 +0200},
  biburl       = {https://dblp.org/rec/conf/aimech/RawlingsDHCK14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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