BibTeX record conf/IEEEisic/DaKT0HSC02

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@inproceedings{DBLP:conf/IEEEisic/DaKT0HSC02,
  author       = {Li Da and
                  Varadarajan Ganesh Kumar and
                  Arthur Tay and
                  Abdullah Al Mamun and
                  Weng Khuen Ho and
                  Alex See and
                  Lap Chan},
  title        = {Run-to-run process control for chemical mechanical polishing in semiconductor
                  manufacturing},
  booktitle    = {Proceedings of the 2002 {IEEE} International Symposium on Intelligent
                  Control, {ISIC} 2002, Vancouver, BC, Canada, October 27-30, 2002},
  pages        = {740--745},
  publisher    = {{IEEE}},
  year         = {2002},
  url          = {https://doi.org/10.1109/ISIC.2002.1157854},
  doi          = {10.1109/ISIC.2002.1157854},
  timestamp    = {Mon, 17 Jul 2023 10:53:50 +0200},
  biburl       = {https://dblp.org/rec/conf/IEEEisic/DaKT0HSC02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}