Tetsuaki Matsunawa Hirokazu Nosato Hidenori Sakanashi Masahiro Murakawa Eiichi Takahashi Tsuneo Terasawa Toshihiko Tanaka Osamu Suga Tetsuya Higuchi Adaptive Optical Proximity Correction Using an Optimization Method. 853-860 2007 CIT http://doi.ieeecomputersociety.org/10.1109/CIT.2007.42 conf/IEEEcit/2007 db/conf/IEEEcit/IEEEcit2007.html#MatsunawaNSMTTTSH07