BibTeX record conf/IEEEcca/WuTHT07

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@inproceedings{DBLP:conf/IEEEcca/WuTHT07,
  author       = {Xiaodong Wu and
                  Arthur Tay and
                  Weng Khuen Ho and
                  Kok Kiong Tan},
  title        = {Real-time estimation and control of photoresist properties in microlithography},
  booktitle    = {Proceedings of the {IEEE} International Conference on Control Applications,
                  {CCA} 2007, Singapore, October 1-3, 2007},
  pages        = {694--699},
  publisher    = {{IEEE}},
  year         = {2007},
  url          = {https://doi.org/10.1109/CCA.2007.4389313},
  doi          = {10.1109/CCA.2007.4389313},
  timestamp    = {Sun, 25 Oct 2020 22:32:57 +0100},
  biburl       = {https://dblp.org/rec/conf/IEEEcca/WuTHT07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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