BibTeX record conf/3dic/ToyodaSHMSHMS11

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@inproceedings{DBLP:conf/3dic/ToyodaSHMSHMS11,
  author       = {Satoru Toyoda and
                  A. Shibata and
                  M. Harada and
                  Takahide Murayama and
                  Toshiyuki Sakuishi and
                  M. Hatanaka and
                  Yasuhiro Morikawa and
                  Koukou Suu},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {{TSV} process solution for 3D-IC},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262945},
  doi          = {10.1109/3DIC.2012.6262945},
  timestamp    = {Sun, 02 Aug 2020 19:34:29 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/ToyodaSHMSHMS11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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