BibTeX record conf/3dic/TaoLZLAT19

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@inproceedings{DBLP:conf/3dic/TaoLZLAT19,
  author       = {Jing Tao and
                  Hongyu Li and
                  Peng Zhao and
                  Yu Dian Lim and
                  Anak Agung Alit Apriyana and
                  Chuan Seng Tan},
  title        = {Design Considerations and Fabrication Challenges of Surface Electrode
                  Ion Trap with {TSV} Integration},
  booktitle    = {2019 International 3D Systems Integration Conference (3DIC), Sendai,
                  Japan, October 8-10, 2019},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/3DIC48104.2019.9058780},
  doi          = {10.1109/3DIC48104.2019.9058780},
  timestamp    = {Sat, 30 Sep 2023 09:32:44 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/TaoLZLAT19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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