BibTeX record conf/3dic/TakigawaNIKHKA15

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@inproceedings{DBLP:conf/3dic/TakigawaNIKHKA15,
  author       = {Ryo Takigawa and
                  Kohei Nitta and
                  Akihiro Ikeda and
                  Mitsuaki Kumazawa and
                  Toshiharu Hirai and
                  Michio Komatsu and
                  Tanemasa Asano},
  title        = {High-speed via hole filling using electrophoresis of Ag nanoparticles},
  booktitle    = {2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai,
                  Japan, August 31 - September 2, 2015},
  pages        = {TS5.4.1--TS5.4.4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/3DIC.2015.7334570},
  doi          = {10.1109/3DIC.2015.7334570},
  timestamp    = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/TakigawaNIKHKA15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}