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BibTeX record conf/3dic/ParkSK19
@inproceedings{DBLP:conf/3dic/ParkSK19, author = {Hae{-}Sung Park and Han Kyeol Seo and Sarah Eunkyung Kim}, title = {Characterization of Nitride Passivated Cu Surface for Low-Temperature Cu-Cu Bonding}, booktitle = {2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019}, pages = {1--4}, publisher = {{IEEE}}, year = {2019}, url = {https://doi.org/10.1109/3DIC48104.2019.9058774}, doi = {10.1109/3DIC48104.2019.9058774}, timestamp = {Sun, 19 Apr 2020 18:57:24 +0200}, biburl = {https://dblp.org/rec/conf/3dic/ParkSK19.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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