BibTeX record conf/3dic/NakatsukaKKMNOZ11

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@inproceedings{DBLP:conf/3dic/NakatsukaKKMNOZ11,
  author       = {Osamu Nakatsuka and
                  Hideki Kitada and
                  Young{-}Suk Kim and
                  Yoriko Mizushima and
                  Tomoji Nakamura and
                  Takayuki Ohba and
                  Shigeaki Zaima},
  editor       = {Mitsumasa Koyanagi and
                  Morihiro Kada},
  title        = {Characterization of local strain around trough silicon via interconnects
                  in wafer-on-wafer structures},
  booktitle    = {2011 {IEEE} International 3D Systems Integration Conference (3DIC),
                  Osaka, Japan, January 31 - February 2, 2012},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/3DIC.2012.6262971},
  doi          = {10.1109/3DIC.2012.6262971},
  timestamp    = {Sun, 25 Oct 2020 22:39:02 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/NakatsukaKKMNOZ11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}