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BibTeX record conf/3dic/MurugesanKF19
@inproceedings{DBLP:conf/3dic/MurugesanKF19, author = {Mariappan Murugesan and Mitsumasa Koyanagi and Takafumi Fukushima}, title = {Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application in 3D-LSI}, booktitle = {2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019}, pages = {1--5}, publisher = {{IEEE}}, year = {2019}, url = {https://doi.org/10.1109/3DIC48104.2019.9058853}, doi = {10.1109/3DIC48104.2019.9058853}, timestamp = {Sun, 04 Aug 2024 19:42:15 +0200}, biburl = {https://dblp.org/rec/conf/3dic/MurugesanKF19.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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