BibTeX record conf/3dic/MizushimaKNKMFO14

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@inproceedings{DBLP:conf/3dic/MizushimaKNKMFO14,
  author       = {Yoriko Mizushima and
                  Young{-}Suk Kim and
                  Tomoji Nakamura and
                  Shoichi Kodama and
                  Nobuhide Maeda and
                  Koji Fujimoto and
                  Takayuki Ohba},
  title        = {Impact of Thermomechanical Stresses on Ultra-thin Si Stacked Structure},
  booktitle    = {2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale,
                  Ireland, December 1-3, 2014},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/3DIC.2014.7152161},
  doi          = {10.1109/3DIC.2014.7152161},
  timestamp    = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/MizushimaKNKMFO14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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