BibTeX record conf/3dic/KrugerVW21

download as .bib file

@inproceedings{DBLP:conf/3dic/KrugerVW21,
  author       = {Patrick Kr{\"{u}}ger and
                  Thomas Vo{\ss} and
                  Matthias Wietstruck},
  title        = {Bond Strength Optimization of Plasma Activated Low Temperature Oxide-Oxide
                  Fusion Bonding Through Thermocycling},
  booktitle    = {{IEEE} International 3D Systems Integration Conference, 3DIC 2021,
                  Raleigh, NC, USA, October 26-29, 2021},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/3DIC52383.2021.9687600},
  doi          = {10.1109/3DIC52383.2021.9687600},
  timestamp    = {Fri, 18 Feb 2022 10:36:41 +0100},
  biburl       = {https://dblp.org/rec/conf/3dic/KrugerVW21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.