BibTeX record conf/3dic/BeaMONKLFTK09

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@inproceedings{DBLP:conf/3dic/BeaMONKLFTK09,
  author       = {Ji Chel Bea and
                  Mariappan Murugesan and
                  Yuki Ohara and
                  Akihiro Noriki and
                  Hisashi Kino and
                  Kang Wook Lee and
                  Takafumi Fukushima and
                  Tetsu Tanaka and
                  Mitsumasa Koyanagi},
  title        = {Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement
                  of thinned silicon substrates for 3D integration},
  booktitle    = {{IEEE} International Conference on 3D System Integration, 3DIC 2009,
                  San Francisco, California, USA, 28-30 September 2009},
  pages        = {1--5},
  publisher    = {{IEEE}},
  year         = {2009},
  url          = {https://doi.org/10.1109/3DIC.2009.5306568},
  doi          = {10.1109/3DIC.2009.5306568},
  timestamp    = {Sat, 30 Sep 2023 09:32:44 +0200},
  biburl       = {https://dblp.org/rec/conf/3dic/BeaMONKLFTK09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}