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ORCIDKazuya Masu
- > Home > Persons > Kazuya Masu
Publications
- 2021
[c61]Kohei Shibata, Akihiro Uchiyama, Akira Onishi, Shinichi Iida, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito:
A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology. IEEE SENSORS 2021: 1-4- 2018
- [j41]Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane
, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu:
A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers. IEICE Electron. Express 15(2): 20171227 (2018) - 2017
- [c56]Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone:
A study on young's modulus of electroplated gold cantilevers for MEMS devices. NEMS 2017: 264-267 - 2016
- [j38]Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida:
Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer. Microelectron. Reliab. 66: 78-84 (2016) - [c53]Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi:
A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. IEEE SENSORS 2016: 1-3 - [c52]Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida:
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. NEMS 2016: 419-422 - 2014
- [c42]Yusuke Shiino, Hiroyuki Ito, Taku Fujiwara, Noboru Ishihara, Hisashi Yamanouchi, Hiroki Tanabe, Satoshi Nomura, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu:
An ultra low power pH-monitoring IC with a duty-cycling wireless FM-transmitter. ISCAS 2014: 882-885 - 2013
- [c41]Kazuya Masu, Noboru Ishihara, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi:
Challenges in integration of diverse functionalities on CMOS. ASP-DAC 2013: 390-393 - [c40]Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu:
A mixed-design technique for integrated MEMS using a circuit simulator with HDL. MIXDES 2013: 17-22
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