Shoichi Murakami

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▷ joint publications with Norihiro Tsujioka

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Publications

2015
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Hiroshi Taka, Katsumasa Suzuki, Norihiro Tsujioka, Shoichi Murakami:
Development of high-quality low-temperature (≤ 120°C) PECVD-SiN films by organosilane. 3DIC 2015: TS8.2.1-TS8.2.4

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