Katsuyuki Machida

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Shinichi Iida

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Publications

2021
[c12]
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  - conf/ieeesensors/ShibataUOIKIMMI21
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  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/ShibataUOIKIMMI21
Kohei Shibata, Akihiro Uchiyama, Akira Onishi, Shinichi Iida, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito:
A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology. IEEE SENSORS 2021: 1-4
2019
[c10]
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  - conf/ieeesensors/NittaSTCCYIMIM19
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  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/NittaSTCCYIMIM19
Kyotaro Nitta, Masato Sone, Haochun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu:
Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability. IEEE SENSORS 2019: 1-4

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