| 2011 | ||
|---|---|---|
| c2 | Kosuke Kitaichi, Haruo Shimamoto, Chuichi Miyazaki, Yoshiyuki Abe, Sigeaki Saito, Shoji Yasunaga: Development of high accuracy wafer thinning and pickup technology for thin wafer. 3DIC 2011: 1-5 | |
| 2010 | ||
| c1 | Chuichi Miyazaki, Haruo Shimamoto, Toshihide Uematsu, Yoshiyuki Abe, Kosuke Kitaichi, Tadahiro Morifuji, Shoji Yasunaga: Development of high accuracy wafer thinning and pickup technology for thin wafer. 3DIC 2010: 1-4 | |
| 1 | Yoshiyuki Abe | |
| 2 | Kosuke Kitaichi | |
| 3 | Chuichi Miyazaki | |
| 4 | Tadahiro Morifuji | |
| 5 | Sigeaki Saito | |
| 6 | Haruo Shimamoto | |
| 7 | Toshihide Uematsu |
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