| 2011 | ||
|---|---|---|
| c2 | Fumihiro Inoue, Harold Philipsen, Alex Radisic, Silvia Armini, Peter Leunissen, Hiroshi Miyake, Ryohei Arima, Tomohiro Shimizu, Toshiaki Ito, Hirofumi Seki, Yuko Shinozaki, Tomohiko Yamamoto, Shoso Shingubara: Low temperature through-Si via fabrication using electroless deposition. 3DIC 2011: 1-4 | |
| 2010 | ||
| c1 | Fumihiro Inoue, Takumi Yokoyama, Hiroshi Miyake, Shukichi Tanaka, Toshifumi Terui, Tomohiro Shimizu, Shoso Shingubara: All-wet fabrication technology for high aspect ratio TSV using electroless barrier and seed layers. 3DIC 2010: 1-5 | |
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