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A. Bergmaier
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2000 – 2009
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2001
[j1]
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A. Stadler
,
I. Genchev
,
A. Bergmaier
,
G. Dollinger
,
V. Petrova-Koch
,
Walter Hansch
,
H. Baumgärtner
,
I. Eisele
:
Nitrogen implantations for rapid thermal oxinitride layers.
Microelectronics Reliability 41
(7): 977-980 (2001)
Coauthor Index
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1
H. Baumgärtner
[j1]
2
G. Dollinger
[j1]
3
I. Eisele
[j1]
4
I. Genchev
[j1]
5
Walter Hansch
[j1]
6
V. Petrova-Koch
[j1]
7
A. Stadler
[j1]