BibTeX records: Janusz H. C. Sedlacek

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@article{DBLP:journals/ibmrd/RothschildFKPS97,
  author       = {Mordechai Rothschild and
                  Anthony R. Forte and
                  Roderick R. Kunz and
                  Susan C. Palmateer and
                  Janusz H. C. Sedlacek},
  title        = {Lithography at a wavelength of 193 nm},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {41},
  number       = {1{\&}2},
  pages        = {49--56},
  year         = {1997},
  url          = {https://doi.org/10.1147/rd.411.0049},
  doi          = {10.1147/RD.411.0049},
  timestamp    = {Fri, 13 Mar 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/RothschildFKPS97.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}