BibTeX records: N. W. Cheung

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@article{DBLP:journals/mr/YangCDSWLC02,
  author       = {Bing{-}Liang Yang and
                  N. W. Cheung and
                  S. Denholm and
                  J. Shao and
                  Hei Wong and
                  P. T. Lai and
                  Y. C. Cheng},
  title        = {Ultra-shallow n\({}^{\mbox{+}}\)p junction formed by PH\({}_{\mbox{3}}\)
                  and AsH\({}_{\mbox{3}}\) plasma immersion ion implantation},
  journal      = {Microelectron. Reliab.},
  volume       = {42},
  number       = {12},
  pages        = {1985--1989},
  year         = {2002},
  url          = {https://doi.org/10.1016/S0026-2714(02)00099-9},
  doi          = {10.1016/S0026-2714(02)00099-9},
  timestamp    = {Sat, 22 Feb 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/YangCDSWLC02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}