Volume 4, Number 1, March 2003
Wen-Hwa Chen, Chyuan-Jau Shieh: On Angular Speed Loss Analysis Of Flat Belt Transmission System By Finite Element Method. 1-18
G. Andal Jayalakshmi, H. Prabhu, R. Rajaram: An Adaptive Mobile Robot Path Planner For Dynamic Environments With Arbitrary-Shaped Obstacles. 67-84
Shuichi Torii: Effect Of Aspect Ratio Of Unsteady Thermal-Fluid Transport Phenomena In Cavities Under Reduced Gravity. 85-97
Abdeljalil Benyoub, El Mostafa Daoudi: Study Of The Parallel Continuous Global Optimization Based On Interval Arithmetic. 99-108
Lalitha Chattopadhyay: Analytical Determination Of Stress Intensity Factor For Plate Bending Problems. 109-119
Larry A. Lambe, Richard Luczak, John W. Nehrbass: A New Finite Difference Method For The Helmholtz Equation Using Symbolic Computation. 121-144
Volume 4, Number 2, June 2003
Robin H. Liu, Jianing Yang, Ralf Lenigk, Justin Bonanno, Frederic Zenhausern, Piotr Grodzinski: Fully Integrated Microfluidic Biochips For Dna Analysis. 145-150
Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller: Advanced Silicon Micromachining. 151
J. G. E. Gardeniers, A. Van Den Berg: Lab-On-A-Chip Systems For Biomedical And Environmental Monitoring. 157-162
Paul Muralt: Piezoelectric Micromachined Ultrasonic Transducers For Rf Filtering And Ultrasonic Imaging. 163-168
Volker Saile: Fabrication Of Polymer Microsystems. 175-180
Dong-Il Cho, Byoung-Doo Choi, Sangwoo Lee, Seung Joon Paik, Sangjun Park, Jaehong Park, Yonghwa Park, Jongpal Kim, Il-Woo Jung: Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems. 181-187
Arun Majumdar: Mems As A Platform For Nanoexploration And Nanointegration. 189-194
Minhang Bao, Yuancheng Sun, Yiping Huang, Yuelin Wang: Safe Operation Conditions Of Capacitive Inertial Sensor For Dynamic Signals. 195-200
W. T. Lin, J. C. Chiou: Multi-Directional Dual Comb-Drive Actuator For Optical Applications. 201-204
Yuan Xu, Christina Yuan Ling Tan, Wen Ping Wang, Francis Eng Hock Tay: Simulation Of Large Membrane Deformation In An Electrochemical Actuator. 205-210
Y. Lu, J. P. Yang, N. B. Chong: A Novel Design Of R/W Head Positioning Microactuator In Hard Disc Drives. 211-214
Ajay Agarwal, Terence Gan, Janak Singh, Yue K. Hoh, Andrew A. O. Tay: Study On Bimorph And Multimorph Microactuators. 215-219
Yongqing Fu, Hejun Du, Weimin Huang, Min Hu: Tini Film Based Shape Memory Alloy And Microactuators. 221-225
Bangtao Chen, Jianmin Miao, Hong Zhu: Analysis And Comparison Of Flexure Structures Used In 3-D Electrostatic Microactuators For Hard Disk Drives. 227-230
Yubo Miao, Yu Chen, Quanbo Zou, Janak Singh, Tie Yan, Chew-Kiat Heng, Tit Meng Lim: Low Cost Micro-Pcr Array And Micro-Fluidic Integration On Single Silicon Chip. 231-234
Yubo Miao, Chong Ser Chong, Taichong Chai, Yu Chen, Quanbo Zou, Tie Yan, Chew-Kiat Heng, Tit Meng Lim: Flip-Chip Packaged Micro-Plate For Low Cost Thermal Multiplexing. 235-238
Yiping Huang, Jilie Kong, Jia Zhou, Yingcai Long, Po Li, Haifen Xie, Minhang Bao: Zeolite And Polymer Film Bio-Chemical Mems Sensors. 239-242
K. T. Ooi, C. Yang, C. K. Chai, T. N. Wong, P. H. Ang: Effects Of Electric Double Layer And Viscous Dissipation In Microcapillary. 243-248
Thai-Quang Truong, Xiao-Yang Huang, Nam-Trung Nguyen: Polymeric Stack-Assembled Micropump With SU-8 Check Valves. 249-252
Guolin Xu, Dor Ngi Ting, Vincent Luar, Lin Kiat Saw: A Disposable Self-Priming And Bubble Tolerance Pneumatic Actuation Micro-Pump. 253-256
Michael J. SchöNing, Arshak Poghossian, Joachim W. Schultze: Measuring Seven Parameters By Two Isfet-Modules In A Microcell Set-Up. 257-260
Yuejun Kang, Chun Yang, Xiaoyang Huang: Modelling Of The Capillary Electrochromatography With Application In Biomems. 261-264
E. Y. K. Ng, N. Y. Liu, C. H. Ang: A Multi-Coefficient Slip Model For Ultra-Thin Gas Film Lubrication. 265-268
Zhigang Wu, Thai-Quang Truong, Nam-Trung Nguyen, Xiao-Yang Huang: Characterization Of Microfluidic Devices Using Micro Particle Image Velocimetry. 269-272
C. Yang, T. N. Wong, Y. L. Leu, K. T. Ooi, J. C. Chai: Characterization Of Electroosmotic Flow In Microchannels. 273-276
Guolin Xu, Francis Eng Hock Tay, Yuanzhi Lao, Ciprian Iliescu, Yuan Hong Yu, Vincent Luar, Diana Hartono, Y. Y. Lee: A Dielectrophoresis-Based Bio-Sample Preparation. 277-280
Han Zhang, Franck Chollet, Etienne Burdet, Aun Neow Poo, Dietmar Werner Hutmacher: Fabrication Of 3-D Microparts For The Assembly Of Scaffold/Cell Constructs In Tissue Engineering. 281-284
Qinghui Wang, Yin Tan, Haiqing Gong: An Integrated System For Real-Time Pcr Analysis Based On Microfluidic Biochip. 285-288
Kwong-Luck Tan, Francis Eng Hock Tay: Memswear - Incorporating Mems Technology Into Smart Shirt For Geriatric Healthcare. 289-292
Yeow-Sheong Wong, Francis Eng Hock Tay, Kwong-Luck Tan: Memswear Fall Sensing System For The Elderly: Design Of A Threshold Accelerometer For Impact Sensing. 293-296

Q. X. Zhang, Q. Y. Guo, J. Li, A. Q. Liu: Investigation Of Loading Effect In Deep Trench Lisa Technology. 303-306
Xiao Lin Zhang, Janak Singh, Ajay Agarwal, Q. X. Zhang: A New Process For Fabricating Convex Corners In Silicon. 307-310
Ajay Agarwal, Xiao Lin Zhang, Terence Gan, Janak Singh: Thin Silicon Structures Fabrication By Wet Anisotropic Etching. 311-314
M. Tang, Ajay Agarwal, Q. X. Zhang, A. Q. Liu: An Approach Of Shadow Mask For Deep-Holes Patterning. 315-318
Tietun Sun, Jianmin Miao, Hong Zhu, Ciprian Iliescu, Jianbo Sun: Study On Feature Of Silicon Microtrenches With A Multiplexed Inductively Coupled Plasma Etcher. 319-322
Wenjiang Zeng, Huamao Lin, Xiaolin Zhang, Ramasamy Chockalingam, Wee Chong Heng, Sangki Hong, Narayanan Balasubramanian: Effects Of Wafer Bonding And Thinning Processes On Electrical Performance Of Mos Devices. 323-326
Jaehong Park, Kidong Park, Seung Joon Paik, Kyo-In Koo, Byoung-Doo Choi, Jongpal Kim, Sangjun Park, Il-Woo Jung, Hyoungho Ko, Dong-Il Cho: Extremely Sharp {111}-Bound, Single-Crystalline Silicon Nano Tips. 327-330
Jun Wei, F. L. Ng, M. L. Nai, H. Xie, Peck Cheng Lim, C. K. Wong: Wafer Bonding Process Based On The Taguchi Analysis. 331-334
Yufeng Jin, Jun Wei, Peck Cheng Lim, Zhenfeng Wang: Hermetic Packaging Of Mems With Thick Electrodes By Silicon-Glass Anodic Bonding. 335-338
Zhenfeng Wang, G. J. Qi, Jun Wei, Peck Cheng Lim, Yufeng Jin, C. K. Wong: A Novel Wafer-Level Packaging Solution For Mems. 339-342
Ciprian Iliescu, Jianmin Miao, Marioara Avram: Fabrication Of Chip Scale Piezoresistive Pressure Sensors Using Screen-Printed Glass Frit Packaging. 343-346
Tong Yan Tee, Giovanni Frezza, Mayhuan Lim, Hun Shen Ng, Federico Ziglioli, Zhaowei Zhong: Design For Board Level Reliability Of A Miniaturized Mems Package: Stacked Die Tqfn. 347-350
W. B. Yu, Jun Wei, C. M. Tan, S. S. Deng, M. L. Nai: Influence Of Applied Load On Wafer Bonding In Vacuum. 351-354
Andreas H. Foitzik, Mechtilde Schäfer, Wolfgang Kaese: High Resolution Microchemical Analysis Of Interfaces In Wire Bonds. 359-362
Jianbo Sun, Jianmin Miao, Tietun Sun, Hong Zhu: Development And Comparison Of Micromachined Inductors For Rf Applications. 363-367
M. Tang, Ajay Agarwal, P. Win, Q. X. Zhang, J. Li, A. Q. Liu: A New Lateral Rf Switch Using Soi-Deep-Etching Fabrication Process. 369-372


F. Bennini, J. Mehner, W. Dötzel: System Level Simulations Of Mems Based On Reduced Order Finite Element Models. 385-388
M. Shamshirsaz, M. Bahrami, M. Tayefeh: Finite Element Analysis Of Time-Dependent Buckling Of Polysilicon Micro Beams With Temperature-Dependent Properties. 393-396
Nisarga N. Naik, Ashish A. Ghangrekar, Sameer U. Kalghatgi, Smitha S. Shetty, Prakash R. Apte: Electrical And Heat Flow Simulation Of Mems Structures Using Spice. 397-400
Andojo Ongkodjojo, Francis Eng Hock Tay: Slide Film Damping And Squeeze Film Damping Models Considering Gas Rarefaction Effects For Mems Devices. 401-404
W. J. Wang, R. M. Lin, T. T. Sun, D. G. Guo: A Novel Mems Fabry-Perot Microcavity Structure For Pressure Sensing Application. 409-412
Xiaochong Deng, Jiaping Yang, Tow Chong Chong: Design And Modeling Of Thermally Actuated Micromirror For Fine-Tracking Mechanism Of High-Density Optical Data Storage. 413-416
J. C. Chiou, Y. J. Lin: A Novel Application Of Contact Friction For Laterally Motion Tunable Acceleration-Threshold Switch: Modeling And Simulation. 417-420
X. Y. Chen, C. Yang, K. C. Toh, J. C. Chai: Numerical Analysis Of The Edl Effect On Liquid Flow In Microchannels. 421-424
W. Z. Li, J. M. Xue, Z. H. Zhou, J. Wang, Hong Zhu, Jianmin Miao, S. J. O'Shea: Design Issues Of Multilayer Piezoelectric Biosensors. 431-434
Volume 4, Number 3, September 2003
Y. C. Lin, J. C. Chiou, C. L. Chen: A Digital/Analog Electrostatic Actuating Mechanism For Optical Applications. 435-438
H. Cai, C. W. Chan, K. V. Ling, C. Lu, Y. X. Wang, A. Q. Liu: A Study Of Closed-Loop Control Of Optical MEMS Device. 439-442
Franck Chollet, Chun Hong Low, Sok Kim Lee, Chun Yang: Fabrication Of Concave And Convex Micro-Optical Elements With Polymer For Free-Space Micro-Optical Bench. 443-446
H. B. Liu, Franck Chollet: Optical Switch Based On Moving Polymer Waveguides And Self-Latching Structure. 447-450
J. Li, J. B. Zhang, X. M. Zhang, C. Lu, Q. X. Zhang: Instructions Micromachined Tunable Filter Via Actuation Of Fabry-Parot Cavity. 451-454
A. Q. Liu, X. M. Zhang, J. Li, D. Y. Tang: Characteristics Of Micromachined Short-External-Cavity Tunable Lasers. 455-459
S. H. Wang, C. Quan, C. J. Tay, I. Reading, Z. P. Fang: Characterization Of The Deformation Of Micro-Components Using Optical Interferometry. 461-465
Andreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, Serguei Arkhipov: Static And Dynamic Characterization Of Mems Via ESPI. 467-470
Jacek Baborowski, Nicolas Ledermann, Paul Muralt, Daniel Schmitt: Simulation And Characterization Of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) Based On Pzt/Soi Membranes. 471-475
Ashok K. Pandey, R. Pratap: Studies In Nonlinear Effects Of Squeeze Film Damping In Mems Structures. 477-480
K. N. Bhat, B. R. K. Reddy, V. Vinoth Kumar, K. Siva Kumar, Y. Sushma, N. Ramesh Babu, K. Natarajan: Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach. 485-488
Prem Pal, Suneet Tuli, Sudhir Chandra: Design And Fabrication Of SIO2 Micromechanical Structures Inside Anisotropically Etched Cavity. 489-492
Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park, Donghun Kwak, Taeyong Song, William Carr, James Bus: A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. 493-496
Andrew B. Randles, Brett J. Pokines, Shuji Tanaka, Masayoshi Esashi: Deep Structures Wet Etched Into Lithium Niobate Using A Physical Mask. 497-500
Jianxia Gao, Mary B. Chan-Park, Dongzhu Xie, Bryan K. A. Ngoi, Chee Yoon Yue: Sub-Micron Patterning Titanium Nitride By Focused Ion-Beam Technique. 501-504
V. Pradeep Kumar, S. Karmalkar: Study Of Electroless Nickel On Polished Silicon For Mems Applications. 505-508
Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu: Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film. 509-512
X. B. Zeng, J. F. Li, X. W. Sun, G. J. Qi, X. T. Zeng: Polycrystalline Silicon Thin Film Obtained By Aluminum Induced Crystallization. 513-516
K. L. Zhang, S. K. Chou, Simon S. Ang, X. S. Tang, J. S. Phang: Investigation Of Solid Propellant Microthrusters. 517-520
Sudhir Chandra, Vivekanand Bhatt, Shrawan K. Jha: Sputtered Silicon Dioxide Films For Mems Application. 521-524
Gregor Wiche, Jost Goettert, Yujun Song, Josef Hormes, Challa S. S. R. Kumar: Functional Micro Devices Using 'Nanoparticle-Photoresist' Composites. 525-528
Zhong-Geng Ling, Kun Lian, Jian Zhang: Characterization And Application Of Pag Diluted SU-8. 529-532
Kun Lian, J. C. Jiang, S. Wen, C. G. Liu, Zhong-Geng Ling: Thermal Stability And Resulting Surface Mechanical Properties Of Electroplated Nanocrystalline Ni-Based Mems Material. 533-536
Shuhui Yu, Kui Yao, Francis Eng Hock Tay: (100)-Oriented PZN-xpt Thin Films Grown On Lanio3 Seeding Layers. 537-541
Tibor Lalinsky, M. Krnac, S. Hascik, Z. Mozolova, L. Matay, I. Kostic, P. Hrkut, Jiri Jakovenko, Miroslav Husak: Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure. 543-546
Ning Jiang, Rajnish K. Sharma, Hanhua Feng, Zhe Wang, Xiaowei Wang: Impact Of Deposition Parameters On The Characterizations Of Highly Orientated Aluminum Nitride For Film Bulk Acoustic Resonator Device. 547-550
Jian-Jun Yuan, Shi-Yuan Cheng, Lei Jiang, Lin-Xian Feng, Zhi-Qiang Fan: Nanostructured Aggregates From The Self-Assembly Of Bab Triblock Copolymers With A Hydrophilic Middle Block A In Water. 551-554
C. Venkatesh, Shashidhar Pati, Navakanta Bhat: Torsional Mems Varactor With Low Actuation Voltage. 555-558
Ching Lian Chua, Franck Chollet, Jie He: Study Of A Biological Actuator And Sensor: The Mimosa Pudica. 559-562
F. Calame, J. Baborowski, N. Ledermann, P. Muralt: Local Growth Of SOL-GEL Films By Means Of Microhotplates. 563-568
J.-M. Huang, A. Q. Liu, X. M. Zhang, J. Ahn: A Novel Lumped Two Degrees Of Freedom Pull-In Approach To Electrostatic Torsional Micromirrors. 569-572
J. Li, Q. X. Zhang, A. Q. Liu: Prevent Notching For Soi Microstructure Fabrication Using SIO2 Thin Film Technique. 577-580
Liujiang Yu, B. K. Tay, D. Sheeja, Y. Q. Fu, Jianmin Miao: Fabrication Of Amorphous Carbon Micro-Membranes By Deep Reactive Ion Etching Technique. 581-584
Jong Ren Kong, Oliver Wilhelmi, Herbert O. Moser: Gap Optimisation For Proximity X-Ray Lithography Using The Super-Resolution Process. 585-588
Il-Woo Jung, Jaehong Park, Byoung-Doo Choi, Jongpal Kim, Sangjun Park, Seung Joon Paik, Dong-Il Cho: New Vertical Array Actuators Using Extended Sbm And Deep Pn Junction Isolation. 589-592
Guangya Zhou, Francis Eng Hock Tay, Chau Fook Siong: Modeling Of A Two-Axis Torsional Micromirror Using Ahdl. 593-596
Mechtilde Schäfer, Matthias Walz, Reiner Stein, Lars Vollmer, Günther Schuster, Andreas H. Foitzik: The Goeppingen Genereactor For Dna-Analysis. 597-600
Mechtilde Schäfer, R. Starzmann, Andreas H. Foitzik: Chemical Microreactors For In-Situ Online Process Monitoring. 601-604
Andreas H. Foitzik, Mechtilde Schäfer, Reiner Stein, Lars Vollmer, Günther Schuster: Three Dimensional Reference Structures For Confocal Microscopy. 605-608
Matthias Küchler, Thomas Otto, Thomas Gessner, Frank Ebling, Henning Schröder: Hot Embossing For Mems Using Silicon Tools. 609-612
Woei Wan Tan, Pei Ge, Francis Eng Hock Tay, Ai Poh Loh: Development Of A 3-Plates Capacitive Pressure Sensor. 613-616
Y. Murakoshi, X. C. Shan, Ryutaro Maeda: Application Of Micro Hot Embossing For MEMS Structures. 617-620
H. Liu, Stephen Y. M. Wan, G. C. Lim, Andrew A. O. Tay: The Development Of A Polymer Based Piezo-Actuated Micropump. 621-625
Rakesh P. Dhote, Sudhir S. Chiluveru, Saurabh A. Chandorkar, Prakash R. Apte: A Novel Heatuator. 627-630
Wei Zhang, Xi Yao, Xiaoqing Wu: Novel Preparation Scheme Of Monolithic Pyroelectric Thin Film Infrared Sensor. 631-636
Wei Zhang, Xi Yao, Xiaoqing Wu: Two-Dimensional Thermal Analysis Of Multi-Layer Thin Film Pyroelectric Infrared Detectors. 637-640
A. L. Palaniappan, J. Zhang, Xiaodi Su, Francis Eng Hock Tay: Electrical Impedance And Energy Dissipation Analyses Of Quartz Crystal Microbalance For Polymer Coating. 645-649
Yuanzhi Lao, Francis Eng Hock Tay, Guolin Xu, Diana Hartono, Y. Y. Lee: A Non-Contact Micro Thermocycling Chip For Polymerase Chain Reactions. 651-654
Vijay K. Srivastava, Ratnamala Chatterjee, T. C. Goel: Structural And Magnetic Property Of Aged Ni2mnal Heusler Alloys. 659-662
Yee Ting Wong, M. Manimaran, Francis Eng Hock Tay: Synthesis And Characterisation Of Alkanethiolated Nanogold Clusters For Biomems Applications. 663-666
D. Sheeja, B. K. Tay, L. J. Yu, Jianmin Miao, Y. Q. Fu, D. H. C. Chua, W. I. Milne: Fabrication Of Smooth Diamond-Like Carbon Microcantilever Arrays. 671-674
Shashidhar Pati, C. Venkatesh, Navakanta Bhat, Rudra Pratap: Voltage Controlled Oscillator Using Tunable Mems Resonator. 675-678
Aiping Fang, Hian Kee Lee, Suresh Valiyaveeti: Microfluidic Channels Modified With Collodial Palladium As An Efficient Catalyst For High Throughput Suzuki Coupling Reactions. 683-686
Ciprian Iliescu, Tietun Sun, Jianmin Miao, Francis Eng Hock Tay: Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And Silicon Bonded Top-Plate. 687-690
Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou: Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) Silicon Wafer Using Scanning Probe Lithography And Anisotropic Wet Etching. 695-698
Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou: Nanometer-Scale Patterning On Titanium Thin Film With Local Oxidation Of Scanning Probe Microscope. 699-702
Miroslav Husak, P. Kulha, Jiri Jakovenko, Z. Vyborny: Mechanical, Thermal And Electrical Behaviour Of Si Strain Gauge. 703-706
Masaaki Ichiki, Lulu Zhang, Zhen Yang, Tsuyoshi Ikehara, Ryutaro Maeda: Thin Film Formation On Non-Planar Surface With Use Of Spray Coating Fabrication. 707-710
S. Myllymaki, Eero Ristolainen, P. Heino, A. Lehto, K. Varjonen: Evaluation Of Resonating Channel Transistor In SOI Wafer. 711-714
V. A. Kudryashov, X.-C. Yuan, T. L. Tan, P. Lee, S. F. A. Karim, B. L. Tan: 3d Structures Formation In A Single Layer Su-8 Car Using Dual Uv And Electron-Beam Lithography. 719-723
X. C. Shan, Ryutaro Maeda, Tsuyoshi Ikehara, Z. F. Wang, C. K. Wong: A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing. 724-728
Z. W. Zhong, K. C. Chan, Y. H. Chen: Characterisation Of Electroplated Eutectic Sn-Ag Solder. 733-736
Volume 4, Number 4, December 2003
K. S. Surana, A. R. Ahmadi, J. N. Reddy: The k-version of finite element method for non-self-adjoint operators in BVP. 737-812
K. H. Park, P. K. Banerjee: Axisymmetric transient heat conduction analysis by bem via particular integrals. 813-828
Jiunn Chit Ong, Ashraf Ali Omar, Waqar Asrar: Evaluation of gas-kinetic schemes for solving 1d inviscid compressible flow problems. 829-851
Mahmood K. Mawlood, Waqar Asrar, Ashraf Ali Omar, Megat M. H. M. Ahmad: An accurate scheme for gas dynamical calculations. 853-868
Luigino Zovatto, Matteo Nicolini: The meshless approach for the cell method: a new way for the numerical solution of discrete conservation laws. 869-880



