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| 2001 | ||
|---|---|---|
| 1 | M. C. Poon, Y. Gao, Ted Chi-Wah Kok, A. M. Myasnikov, Hei Wong: SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. Microelectronics Reliability 41(12): 2071-2074 (2001) | |
| 1 | Y. Gao | [1] |
| 2 | Chi-Wah Kok (Ted Chi-Wah Kok) | [1] |
| 3 | M. C. Poon | [1] |
| 4 | Hei Wong | [1] |
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