U. Muehle

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2005

1 U. Muehle, A. Lenk, R. Weiland, H. Lichte: Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation. Microelectronics Reliability 45(9-11): 1558-1561 (2005)

	2005
1		U. Muehle, A. Lenk, R. Weiland, H. Lichte: Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation. Microelectronics Reliability 45(9-11): 1558-1561 (2005)

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