 | 2007 |
|---|
| 4 |       | M. Guerino,
M. Massi,
Ronaldo Domingues Mansano:
The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C: H) films.
Microelectronics Journal 38(8-9): 915-918 (2007) |
| 2003 |
|---|
| 3 | | Ana Paula Mousinho,
Ronaldo Domingues Mansano,
M. Massi,
Luís da Silva Zambom:
High density plasma chemical vapor deposition of diamond-like carbon films.
Microelectronics Journal 34(5-8): 627-629 (2003) |
| 2 | | M. Massi,
J. M. J. Ocampo,
H. S. Maciel,
K. Grigorov,
C. Otani,
L. V. Santos,
Ronaldo Domingues Mansano:
Plasma etching of DLC films for microfluidic channels.
Microelectronics Journal 34(5-8): 635-638 (2003) |
| 1 | | M. Guerino,
M. Massi,
H. S. Maciel,
C. Otani,
Ronaldo Domingues Mansano:
The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films.
Microelectronics Journal 34(5-8): 639-641 (2003) |
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