T. Makabe

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2007

1 T. Makabe, T. Shimada, T. Yagisawa: Plasma etching and feature evolution of organic low-k material by using VicAddress. Computer Physics Communications 177(1-2): 64-67 (2007)

	2007
1		T. Makabe, T. Shimada, T. Yagisawa: Plasma etching and feature evolution of organic low-k material by using VicAddress. Computer Physics Communications 177(1-2): 64-67 (2007)

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