 | 2011 |
|---|
| 5 |       | Wei-Ming Wu,
Fan-Tien Cheng,
Tung-Ho Lin,
Deng-Lin Zeng,
Jyun-Fang Chen:
Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy.
IEEE T. Automation Science and Engineering 8(2): 311-318 (2011) |
| 2010 |
|---|
| 4 | | Wen-Huang Tsai,
Fan-Tien Cheng,
Wei-Ming Wu,
Tung-Ho Lin:
Developing a dual-stage indirect virtual metrology architecture.
ICRA 2010: 2107-2112 |
| 2009 |
|---|
| 3 | | Wei-Ming Wu,
Fan-Tien Cheng,
Tung-Ho Lin,
Deng-Lin Zeng,
Jyun-Fang Chen,
Min-Hsiung Hung:
Advanced studies of selection schemes for dual virtual-metrology outputs.
CASE 2009: 421-426 |
| 2008 |
|---|
| 2 | | Tung-Ho Lin,
Fan-Tien Cheng,
Aeo-Juo Ye,
Wei-Ming Wu,
Min-Hsiung Hung:
A novel key-variable sifting algorithm for virtual metrology.
ICRA 2008: 3636-3641 |
| 2006 |
|---|
| 1 |  | Tung-Ho Lin,
Ming-Hsiung Hung,
Rung-Chuan Lin,
Fan-Tien Cheng:
A Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing.
ICRA 2006: 1054-1059 |
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