![]() | ![]() |
| 2004 | ||
|---|---|---|
| 1 | Shiang-Woei Chyuan, Yunn-Shiuan Liao, Jeng-Tzong Chen: Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM. Microelectronics Journal 35(9): 739-748 (2004) | |
| 1 | Jeng-Tzong Chen | [1] |
| 2 | Shiang-Woei Chyuan | [1] |
Data released under the ODC-BY 1.0 license — See also our legal information page