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| 1991 | ||
|---|---|---|
| 1 | Eric Bruls, F. Camerik, H. J. Kretschman, Jochen A. G. Jess: A Generic Method to Develop a Defect Monitoring System for IC Processes. ITC 1991: 218-227 | |
| 1 | Eric Bruls (E. M. J. G. Bruls) | [1] |
| 2 | F. Camerik | [1] |
| 3 | Jochen A. G. Jess | [1] |
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