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| 1971 | ||
|---|---|---|
| 1 | Itaru Aramaki, Tomokazu Kawabata, Kazuhiko Arimoto: Automation of Etching-Pattern Layout. Commun. ACM 14(11): 720-730 (1971) | |
| 1 | Itaru Aramaki | [1] |
| 2 | Kazuhiko Arimoto | [1] |
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