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| 2009 | ||
|---|---|---|
| 1 | Valeriy Sukharev, Ara Markosian, Armen Kteyan, Levon Manukyan, Nikolay Khachatryan, Jun-Ho Choy, Hasmik Lazaryan, Henrik Hovsepyan, Seiji Onoue, Takuo Kikuchi, Tetsuya Kamigaki: Control of design specific variation in etch-assisted via pattern transfer by means of full-chip simulation. ISQED 2009: 156-161 | |
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