S. Kal

	2006
4		S. Kal, S. Das, D. K. Maurya, K. Biswas, A. Ravi Sankar, S. K. Lahiri: CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity. Microelectronics Journal 37(1): 22-30 (2006)
3		K. Biswas, S. Das, D. K. Maurya, S. Kal, S. K. Lahiri: Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Microelectronics Journal 37(4): 321-327 (2006)
2		K. Biswas, S. Kal: Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. Microelectronics Journal 37(6): 519-525 (2006)
1		K. Biswas, S. Das, S. Kal: Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures. Microelectronics Journal 37(8): 765-769 (2006)

Coauthor Index

1	K. Biswas	[1] [2] [3] [4]
2	S. Das	[1] [3] [4]
3	S. K. Lahiri	[3] [4]
4	D. K. Maurya	[3] [4]
5	A. Ravi Sankar	[4]

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