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| 2006 | ||
|---|---|---|
| 1 | Robert W. Johnstone, M. Parameswaran: Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under Differing Residual Stresses. CCECE 2006: 1617-1620 | |
| 1 | M. Parameswaran | [1] |
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