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| 2008 | ||
|---|---|---|
| 1 | A. G. Chao, S. T. Tseng, D. S. H. Wong, S. S. Jang, S. P. Lee: Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing. Winter Simulation Conference 2008: 2330-2334 | |
| 1 | A. G. Chao | [1] |
| 2 | S. P. Lee | [1] |
| 3 | S. T. Tseng | [1] |
| 4 | D. S. H. Wong | [1] |
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